The 75th JSAP Autumn Meeting, 2014

Presentation information

Poster presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

[17p-PA5-1~22] Nanocarbon Technology

Wed. Sep 17, 2014 4:00 PM - 6:00 PM PA5 (Gymnasium1)

ポスター掲示時間16:00~18:00(PA5会場)

4:00 PM - 6:00 PM

[17p-PA5-3] Impurity incorporation and the electrical conduction mechanism of ZnO films fabricated with N2/O2 remote plasma generated near atmospheric pressure

○(DC)Yukinori Nose1, Takuya Kiguchi1, Takeshi Yoshimura1, Atsushi Ashida1, Tsuyoshi Uehara2, Norifumi Fujimura1 (Osaka Prefecture Univ.1, SEKISUI CHEMICAL CO., LTD.2)

Keywords:ZnO,CVD,常圧プラズマ