[17p-S10-3~13] 8. Plasma Electronics English session

▲ [17p-S10-4] Plasma movement mechanism in pseudo-continuous meter-scale atmospheric-pressure line plasma

^○Haruka Suzuki¹, Suguru Nakano¹, Hitoshi Itoh^2,3, Makoto Sekine^1,2, Masaru Hori^1,2, Hirotaka Toyoda^1,2 (Nagoya Univ.¹, PLANT, Nagoya Univ.², Tokyo Electron Ltd.³)

Keywords:atmospheric pressure plasma,microwave plasma,line plasma