[17p-S11-1~6] 8.2 Plasma measurements and diagnostics

[17p-S11-3] Infrared spectroscopy of reactions of self-assembled monolayer with plasmas

^○Masanori Shinohara¹, Naoki Maruno¹, Yuta Yoshida¹, Kazuki Ito¹, Yamato Nakano¹, Yujiro Taniguchi¹, Yoshinobu Matsuda¹, Hiroshi Fujiyama¹ (Nagasaki Univ.¹)

Keywords:自己組織化単分子膜,赤外分光