[17p-S11-1~6] 8.2 Plasma measurements and diagnostics

[17p-S11-4] Gas Temperature Profile in the Proximity of Sputtering Target

^○Yoshinobu Matsuda¹, Yuya Sakaguchi¹, Naoto Arima¹, Masanori Shinohara¹ (Nagasaki Univ.¹)

Keywords:気体温度,スパッタリング,レーザー吸収分光