The 75th JSAP Autumn Meeting, 2014

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Oral presentation

03. Optics and Photonics » 3.8 Optical measurement technology and devices

[17p-S8-1~13] 3.8 Optical measurement technology and devices

Wed. Sep 17, 2014 1:30 PM - 5:00 PM S8 (S8)

3:15 PM - 3:30 PM

[17p-S8-7] Measurement of ITO transparent electrode film thickness with white-light interferometer

○(D)Kai Chen1, Feng Lei1, Masahide Itoh1 (Tsukuba Univ.1)

Keywords:白色干渉計測