[17p-S9-1~17] 3.7 Laser processing

△ [17p-S9-11] Room-temperature oriented crystallization of Ga₂O₃ thin films by UV laser annealing

^○Daishi Shiojiri¹, Daiji Fukuda¹, Ryosuke Yamauchi¹, Satoru Kaneko^2,1, Nobuo Tsutimine³, Masaya Oda⁴, Akifumi Matsuda¹, Mamoru Yoshimoto¹ (Tokyo Inst. of Tech.¹, Kanagawa Ind. Tech. Center², TOSHIMA Manu. Co., Ltd.³, ROCA Co., Ltd.⁴)

Keywords:酸化ガリウム,パルスレーザー堆積法,レーザーアニーリング