[17p-S9-1~17] 3.7 Laser processing

△ [17p-S9-2] Accelerated Ni diffusion at Ni/SiC interface by femtosecond laser irradiation and low temperature annealing

^○Kazuki Morimoto¹, Tomoyuki Ueki², Takuro Tomita², Tatuya Okada² (Graduate School, Tokushima Univ.¹, Tokushima Univ.²)

Keywords:フェムト秒レーザ,SiC,コンタクト形成