[17p-S9-1~17] 3.7 Laser processing

△ [17p-S9-3] Investigation of Ni/SiC interface reaction by femtosecond laser irradiation

^○(B)Kenta Kondo¹, Eizo Yanagita¹, Yota Bando¹, Manato Deki¹, Tatsuya Okada¹, Takuro Tomita¹ (Tokushima Univ.¹)

Keywords:フェムト秒レーザー,ニッケルシリサイド,ラマン分光法