[17p-S9-1~17] 3.7 Laser processing

△ [17p-S9-4] Electrical Conduction Mechanism in Modified Areas Irradiated by Femtosecond Laser on SiC

^○(M1)Eizo Yanagita¹, Kenta Kondo¹, Yota Bando¹, Manato Deki^1,2, Takahiro Makino², Takeshi Ohshima², Yoshiki Naoi¹, Takuro Tomita¹ (Tokushima Univ.¹, JAEA²)

Keywords:フェムト秒レーザー