[18a-A11-1~10] 6.4 New thin-film materials

△ [18a-A11-10] Observation of SiC Substrates / Flux Interface in the Flux Growth of SiC with High-Temperature and High-Vacuum Laser Microscope

^○Aomi Onuma¹, Shingo Maruyama¹, Shunta Harada², Toru Ujihara², Tomohisa Kato^3,4, Kazuhisa Kurashige^4,5, Hajime Okumura^3,4, Yuji Matsumoto^1,6 (Tohoku Univ.¹, Nagoya Univ.², AIST³, FUPET⁴, Hitachi Chemical⁵, JST-ALCA⁶)

Keywords:SiC,レーザー顕微鏡