[18a-A11-1~10] 6.4 New thin-film materials

△ [18a-A11-5] Characteristics of Carbon-doped InSiO channel material

^○Kazunori Kurishima^1,2, Toshihide Nabatame², Nobuhiko Mitoma², Takio Kizu², Kazuhito Tsukagoshi², Tomomi Sawada², Akihiko Ohi², Ippei Yamamoto^2,3, Tomozi Ohishi³, Toyohiro Chikyow², Atsushi Ogura¹ (Meiji Univ.¹, NIMS WPI-MANA², Shibaura Institute of Technology³)

Keywords:炭素添加