The 75th JSAP Autumn Meeting, 2014

Presentation information

Print

Oral presentation

07. Beam Technology and Nanofabrication » 7.5 Particle/photon-beam-induced surface reactions

[18a-A13-1~3] 7.5 Particle/photon-beam-induced surface reactions

Thu. Sep 18, 2014 9:00 AM - 9:45 AM A13 (E304)

9:30 AM - 9:45 AM

[18a-A13-3] Surface chemical modification of DLC film with gas cluster ion irradiation

○(M2)Asahi Kimura1, Masahiro Hayashi1, Noriaki Toyoda1, Isao Yamada1 (Grad. school of eng., Univ of Hyogo1)

Keywords:GCIB,cluster,DLC