The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.5 Si-English Session

[18a-A15-1~7] 13.5 Si-English Session

Thu. Sep 18, 2014 10:30 AM - 12:15 PM A15 (E306)

11:00 AM - 11:15 AM

[18a-A15-3] KPFM Imaging of Donor Clusters in Selectively-Doped SOI-FET

Krzysztof Tyszka1,2, Daniel Moraru1, Takeshi Mizuno1, Ryszard Jablonski2, Michiharu Tabe1 (Shizuoka Univ.1, Warsaw Univ. of Tech.2)

Keywords:dopant cluster,KPFM,nanodevice