11:45 AM - 12:00 PM
[18a-A22-11] Influence of SiNx, SiO2 passivation layer to AlGaN/GaN structure
Keywords:AlGaN/GaN,保護膜
Oral presentation
14. Semiconductors B (Exploratory Materials, Physical Properties, Devices) » 14.3 Electron devices and Process technology
Thu. Sep 18, 2014 9:00 AM - 12:15 PM A22 (E314)
11:45 AM - 12:00 PM
Keywords:AlGaN/GaN,保護膜