[18a-A22-1~12] 14.3 Electron devices and Process technology

[18a-A22-9] Current Collapse Suppression in AlGaN/GaN HEMTs by High Pressure Water Vapor Annealing

^○Kobayashi Yohei¹, Yoshitsugu Koji², Tokuda Hirokuni¹, Horita Masahiro², Uraoka Yukiharu², Kuzuhara Masaaki¹ (Graduate School of Engineering University of Fukui¹, Nara Institute of Science and Technology²)

Keywords:AlGaN/GaN HEMT,HPWVA,電流コラプス