[18a-A9-1~9] 6.1/9.1 Code-sharing session

[18a-A9-9] Unipolar actuation of piezoelectric MEMS microcantilevers with pulse poled PZT thin films

^○takeshi kobayashi¹, natsumi makimoto¹, yasuhiro suzuki², hiroshi funakubo³, ryutaro maeda¹ (AIST¹, Ibaraki Univ.², Tokyo Inst. of Technology³)

Keywords:ポーリング,圧電