The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

Code-sharing session » 6.1/9.1 Code-sharing session

[18a-A9-1~9] 6.1/9.1 Code-sharing session

Thu. Sep 18, 2014 9:00 AM - 11:45 AM A9 (E208)

11:30 AM - 11:45 AM

[18a-A9-9] Unipolar actuation of piezoelectric MEMS microcantilevers with pulse poled PZT thin films

takeshi kobayashi1, natsumi makimoto1, yasuhiro suzuki2, hiroshi funakubo3, ryutaro maeda1 (AIST1, Ibaraki Univ.2, Tokyo Inst. of Technology3)

Keywords:ポーリング,圧電