[18a-C3-1~11] 18.4 Optical Micro-sensing，Manipulation，and Fabrications

▲ [18a-C3-5] SOI Slot Waveguide Based on-Chip Trace Gas Sensor in the Mid-IR

^〇(D)Ajanta Barh, Babita Kumari, R. K. Varshney, B. P. Pal (Physics Department, Indian Institute of Technology Delhi)

Keywords:Silicon-on-insulator waveguide,evanescent field based sensor,mid-IR regime