[18a-C3-1~11] 18.4 Optical Micro-sensing，Manipulation，and Fabrications

▲ [18a-C3-5] SOI Slot Waveguide Based on-Chip Trace Gas Sensor in the Mid-IR

^〇（D）Ajanta Barh，Babita Kumari，R. K. Varshney，B. P. Pal (Physics Department, Indian Institute of Technology Delhi)

キーワード：Silicon-on-insulator waveguide,evanescent field based sensor,mid-IR regime