The 75th JSAP Autumn Meeting, 2014

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Poster presentation

17. Nanocarbon Technology » 17. Nanocarbon Technology (Poster)

[18a-PA3-1~56] 17. Nanocarbon Technology

Thu. Sep 18, 2014 9:30 AM - 11:30 AM PA3 (Gymnasium1)

ポスター掲示時間9:30～11:30(PA3会場)

9:30 AM - 11:30 AM

[18a-PA3-24] Product carbon films on nano-thickness catalyst films for TCO films

○Yuji Kusumoto1, Syunsaku Nishimori1, Toru Harigai1, Hirifumi Koji1, Hiroshi Furuta1,2, Akimitsu Hatta1,2 (Kochi Univ. Tecnol.1, Center for Nanotechnol., Research Inst., Kochi Univ. Technol.2)

Keywords:触媒,プラズマCVD,ナノ膜厚