[18a-PB1-1~4] 1.1 Interdisciplinary and General Physics

[18a-PB1-2] Raman spectroscopy analysis of deep ultraviolet damaged and thermal damaged ta-C

^○Tomomi Kozu^1,2, Makoto Yamaguchi³, Masahiro Kawaguchi⁴, Ken Nishida², Hiromi Shima² (Renishaw KK¹, NDA², Akita Univ.³, TIRI⁴)

Keywords:Raman,ta-C,deep ultraviolet