[18p-A1-1~9] Micro and nano behavior of bio material surfaces and its application

[18p-A1-3] Bio-Medical LSI

^○kazuaki sawada^1,2, kazuhiro takahashi¹, toshiaki hattori^1,2 (Toyohashi University of Technology¹, JST-CREST²)

Keywords:LSI,バイオセンサ,MEMS