[18p-A10-1~10] Oxide electronics at solid-liquid interfaces: Chemistry and deviceapplications

[18p-A10-3] Local anodization selfalignment process for nanodevice fabrication

^○Kimura Yasuo¹, Hirano-Iwata Ayumi², Niwano Michio³ (Tokyo Univ. of Technology¹, Grad. Sch. Biomed. Eng., Tohoku Univ.², RIEC, Tohoku Univ.³)

Keywords:anodization,nanodevice,gas sensor