[18p-A13-1~13] Surface reaction control by atomic and molecular beams, its developmentand application

△ [18p-A13-4] The Effect of Hyperthermal Atomic Oxygen Exposure to Si-doped DLC Films

^○Kengo Kidena¹, Masahito Niibe¹, Kumiko Yokota², Masahito Tagawa², Yuichi Huruyama³, Keiji Komatsu⁴, Hidetoshi Saitoh⁴, Kazuhiro Kanda¹ (LASTI, Univ. of Hyogo¹, Graduate School of Eng., Kobe Univ.², Graduate School of Maritime Sci., Kobe Univ.³, Nagaoka Univ. of Tech.⁴)

Keywords:Si-DLC