The 75th JSAP Autumn Meeting, 2014

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Oral presentation

07. Beam Technology and Nanofabrication » 7.6 Ion beams

[18p-A14-1~18] 7.6 Ion beams

Thu. Sep 18, 2014 1:15 PM - 6:15 PM A14 (E305)

4:45 PM - 5:00 PM

[18p-A14-13] Development of TOF-RBS measurement system using carbon beam

○Keisuke Yasuda1, Yoshinori Nakata1 (WERC1)

Keywords:TOF-RBS,深さ分解能