The 75th JSAP Autumn Meeting, 2014

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Oral presentation

07. Beam Technology and Nanofabrication » 7.6 Ion beams

[18p-A14-1~18] 7.6 Ion beams

Thu. Sep 18, 2014 1:15 PM - 6:15 PM A14 (E305)

6:00 PM - 6:15 PM

[18p-A14-18] Analysis of SOI structure formed by high-temperature oxygen implantation into Si substrates

Tomohiro Kamikawa1, Yasushi Hoshino1, Yasunao Saito1, ○Jyoji Nakata1 (Kanagawa Univ.1)

Keywords:イオン注入,半導体