6:00 PM - 6:15 PM
[18p-A14-18] Analysis of SOI structure formed by high-temperature oxygen implantation into Si substrates
Keywords:イオン注入,半導体
Oral presentation
07. Beam Technology and Nanofabrication » 7.6 Ion beams
Thu. Sep 18, 2014 1:15 PM - 6:15 PM A14 (E305)
6:00 PM - 6:15 PM
Keywords:イオン注入,半導体