The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

07. Beam Technology and Nanofabrication » 7.6 Ion beams

[18p-A14-1~18] 7.6 Ion beams

Thu. Sep 18, 2014 1:15 PM - 6:15 PM A14 (E305)

2:15 PM - 2:30 PM

[18p-A14-5] Velocity control of ClF3 neutral cluster with He carrier gas

Toshio Seki1, Yu Yoshino2, Takehiko Senoo2, Kunihiko Koike2, Kazuhiro Karahashi3, Takaaki Aoki1, Jiro Matsuo1 (Kyoto Univ.1, Iwatani Corp.2, Osaka Univ.3)

Keywords:クラスター