The 75th JSAP Autumn Meeting, 2014

Presentation information

Print

Oral presentation

07. Beam Technology and Nanofabrication » 7.6 Ion beams

[18p-A14-1~18] 7.6 Ion beams

Thu. Sep 18, 2014 1:15 PM - 6:15 PM A14 (E305)

3:00 PM - 3:15 PM

[18p-A14-7] Evaluation of Irradiation Damage on Silicon Surfaces of CnH2n+1+ Polyatomic Ion Beams

○Kyohei Hayashi1, Mitsuaki Takeuchi1, Hiromichi Ryuto1, Gikan Takaoka1 (Kyoto Univ.1)

Keywords:テトラデカン