The 75th JSAP Autumn Meeting, 2014

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Oral presentation

07. Beam Technology and Nanofabrication » 7.6 Ion beams

[18p-A14-1~18] 7.6 Ion beams

Thu. Sep 18, 2014 1:15 PM - 6:15 PM A14 (E305)

3:30 PM - 3:45 PM

[18p-A14-9] 3D molecular imaging of organic multilayer film by Ar gas cluster ion beam

○Keisuke Wakamoto1, Shunichirou Nakagawa1, Toshio Seki1, Takaaki Aoki1 (Kyoto Univ.1)

Keywords:Gas cluster ion beam,SIMS,Molecular imaging