The 75th JSAP Autumn Meeting, 2014

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Oral presentation

03. Optics and Photonics » 3.15 Silicon photonics

[18p-A18-1~15] 3.15 Silicon photonics

Thu. Sep 18, 2014 1:15 PM - 5:15 PM A18 (E310)

4:00 PM - 4:15 PM

[18p-A18-11] High-performance Ge-on-Si pin photodiodes using a laser annealing process

○Sho Nagatomo1, Yuta Kawamata1, Yusaku Izawa2, Satohiko Hoshino3, Yasuhiko Ishikawa1 (Univ.Tokyo1, Tokyo Electron Miyagi2, Tokyo Electron Ltd.3)

Keywords:シリコンフォトニクス,ゲルマニウム