1:15 PM - 1:30 PM
[18p-A20-1] Effect of trench shapes on the strain release of epitaxial alumina
Keywords:ひずみ解放,結晶方位
Oral presentation
15. Crystal Engineering » 15.7 Fundamentals of epitaxy
Thu. Sep 18, 2014 1:15 PM - 2:45 PM A20 (E312)
1:15 PM - 1:30 PM
Keywords:ひずみ解放,結晶方位