The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

14. Semiconductors B (Exploratory Materials, Physical Properties, Devices) » 14.3 Electron devices and Process technology

[18p-A22-1~15] 14.3 Electron devices and Process technology

Thu. Sep 18, 2014 2:00 PM - 6:00 PM A22 (E314)

5:15 PM - 5:30 PM

[18p-A22-13] Investigation of Fe atom diffusion in Ga2O3

Kohei Sasaki1,2, Man Hoi Wong2, Masataka Higashiwaki2, Akito Kuramata1, Shigenobu Yamakoshi1 (Tamura Corp.1, NICT2)

Keywords:Ga2O3,酸化ガリウム,拡散