The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

14. Semiconductors B (Exploratory Materials, Physical Properties, Devices) » 14.3 Electron devices and Process technology

[18p-A22-1~15] 14.3 Electron devices and Process technology

Thu. Sep 18, 2014 2:00 PM - 6:00 PM A22 (E314)

2:45 PM - 3:00 PM

[18p-A22-4] 150-nm InAlN/GaN HEMT fabricated by Y-gate process

Hiroyuki Ichikawa1, Chihoko Mizue1, Isao Makabe1, Yasunori Tateno1, Ken Nakata1, Kazutaka Inoue1 (Sumitomo Electric Industries, Ltd.1)

Keywords:GaN,HEMT,InAlN