[18p-A27-1~17] 14.2 Ultrathin films and quantum nanostructures

[18p-A27-11] High-Density InGaN/GaN Quantum Nano-Structure Fabrication Process by the Combination of Bio-template and Neutral Beam Etching

^○(PC)ChangYong Lee^1,5, Akio Higo², Jitsuo Ohta³, Ichiro Yamashita^4,5, Hiroshi Fujioka^3,5, Seiji Samukawa^1,2,5 (IFS, Tohoku Univ.¹, WPI-AIMR, Tohoku Univ.², IIS, Univ. of Tokyo³, NAIST⁴, JST-CREST⁵)

Keywords:InGaN量子ナノ構造,中性粒子ビームエッチング