[18p-A27-1~17] 14.2 Ultrathin films and quantum nanostructures

▲ [18p-A27-5] Germanium Nano-Wires Fabrication And Size Control by Combined Top-Down Process Neutral Beam Etching And Hydrogen Radical Treatment

^〇M.T. Chentir^1,2, Takeru Okada¹, Naoyuki Kawai³, Kazumi Wada³, Seiji Samukawa^1,2,4 (Inst. of Fluid Sci., Tohoku Univ.¹, CREST Japan Sci. and Tech. Agency², Dept. of Mat. Eng., Univ. of Tokyo³, WPI-Advanced Inst. for Materials Res., Tohoku Univ.⁴)

Keywords:Germanium nanowires,Etching