[18p-A6-1~16] 9.2 ナノワイヤ・ナノ粒子

▼ [18p-A6-5] Elemental Distributions in Individual Ge/Si/Ge Core-Double Shell Nanowires Investigated by Atom Probe Tomography

^○韓斌¹，清水康雄¹，高見澤悠¹，余銘珂^2,3，Wipakorn Jevasuwan²，深田直樹²，井上耕治¹，永井康介¹ (東北大金研¹，物材機構²，筑波大院工³)

キーワード：nanowires,dopant distribution,atom probe tomography