The 75th JSAP Autumn Meeting, 2014

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Oral presentation

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[18p-A8-1~20] 6.2 Carbon-based thin films

Thu. Sep 18, 2014 1:15 PM - 7:00 PM A8 (E207)

4:15 PM - 4:30 PM

[18p-A8-11] Nano-Controlled Doping into Diamondlike Carbon Films

○Susumu Takabayashi1, Hiroyuki Hayashi2, Meng Yang2, Shuichi Ogawa2, Taiichi Otsuji1, Yuji Takakuwa2 (RIEC, Tohoku Univ.1, IMRAM, Tohoku Univ.2)

Keywords:ダイヤモンドライクカーボン, DLC,ドーピング