[18p-A8-1~20] 6.2 Carbon-based thin films

[18p-A8-14] Characterization on optical constants of a-C:H films deposited by RFPECVD with different negative pulsed bias voltages

^○(D)XiaoLong Zhou¹, Sarayut Tunmee¹, Keiji Komatsu¹, Ikumi Toda¹, Shigeo Ohshio¹, Hidetoshi Saitoh¹ (Nagaoka Univ. Tech.¹)

Keywords:水素化アモルファス炭素膜,光学特性,負パルスバイアス電圧