[18p-A8-1~20] 6.2 カーボン系薄膜

▲ [18p-A8-16] Behaviors of optical and corrosion properties of a-C:H films at different thicknesses

^○（D）Sarayut Tunmee，Xiaolong Zhou，Yasuyuki Nakaya，Satoru Arakawa，Ikumi Toda，Keiji Komatsu，Shigeo Ohshio，Hidetoshi Saitoh (長岡技科大)

キーワード：Optical and corrosion properties,Thickness,Hydrogenated amorphous carbon film