The 75th JSAP Autumn Meeting, 2014

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Oral presentation

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[18p-A8-1~20] 6.2 Carbon-based thin films

Thu. Sep 18, 2014 1:15 PM - 7:00 PM A8 (E207)

6:30 PM - 6:45 PM

△ [18p-A8-19] DLC coating on a tube inner wall using nanopulse plasma CVD

○(M2)Ryota Takamura1, Masaki Inoue1, Hiroki Akasaka1, Naoto Ohtake1 (Tokyo Inst.1)

Keywords:DLC,円管内面,ナノパルスプラズマ