[18p-A8-1~20] 6.2 Carbon-based thin films

[18p-A8-2] Formation of graphene and development of patterning method by the electron irradiation to the fullerene and measurement of electrical characteristics by hydrogen doped sample

^○Seiya Matsukawa¹, Tomoki Imamura¹, Kyota Matsuo¹, Masao Yoshioka¹, Hiroshi Kubota¹ (GSST Kumamoto Univ.¹)

Keywords:グラフェン,アモルファスカーボン