[18p-A8-1~20] 6.2 Carbon-based thin films

△ [18p-A8-4] The change of electrical resistivity due to various gas species of amorphous carbon nitride films prepared by reactive RF sputtering

^○Naoyuki Tamura¹, Masami Aono¹, Hisashi Miyazaki¹, Nobuaki Kitazawa¹, Yoshihisa Watanabe¹ (NDA¹)

Keywords:アモルファス,窒化炭素,電気特性