[18p-B3-1~14] Present and Future of Functional atomic thin film research

△ [18p-B3-5] Evaluation of High-Temperature Sputter-deposited MoS₂ Film by Raman Spectroscopy

^○Seiya Ishihara¹, Kohei Suda¹, Naomi Sawamoto¹, Takumi Ohashi², Shinpei Yamaguchi², Kentarou Matsuura², Hitoshi Wakabayashi², Atsushi Ogura¹ (Meiji Univ.¹, Tokyo Tech.²)

Keywords:MoS2,ラマン