[18p-B3-1~14] Present and Future of Functional atomic thin film research

[18p-B3-6] Chemical vapor deposition for synthesis of layered-metal calcogenide: growth mechanism and spontaneous nano-structure formation

^○Takashi Yanase¹, Syo Watanabe¹, Yu Hashimoto², Dai Kutsuzawa², Taro Nagahama¹, Toshihiro Shimada¹ (Hokkaido Univ.¹, Hokkaido Univ.²)

Keywords:化学気相蒸着法,MoS2