The 75th JSAP Autumn Meeting, 2014

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Oral presentation

03. Optics and Photonics » 3.12 Nanoscale optical science and near-field optics

[18p-C1-1~10] 3.12 Nanoscale optical science and near-field optics

Thu. Sep 18, 2014 1:30 PM - 4:00 PM C1 (B11)

2:45 PM - 3:00 PM

[18p-C1-6] Improving optical properties of damaged semiconductor surface by laser processing

○Wataru Nomura1, Tadashi Kawazoe1, Motoichi Ohtsu1 (Univ. Tokyo1)

Keywords:レーザープロセス,SiC,レーザーダメージ