[18p-C3-1~9] 18.4 Optical Micro-sensing，Manipulation，and Fabrications

▲ [18p-C3-7] Profile monitoring on surface relief gratings by spectroscopic ellipsometry

^〇Roman Antos^1,2, Martin Veis², Jan Mistrik³, Martin Karlovec³, Miroslav Vlcek³, Takayuki Ishibashi¹ (Nagaoka University of Technology¹, Charles University in Prague², University of Pardubice³)

Keywords:sinusoidal grating,spectroscopic ellipsometry,nickel