4:15 PM - 4:30 PM
▲ [18p-C3-7] Profile monitoring on surface relief gratings by spectroscopic ellipsometry
Keywords:sinusoidal grating,spectroscopic ellipsometry,nickel
Oral presentation
18.JSAP-OSA Joint Symposia » 18.4 Optical Micro-sensing,Manipulation,and Fabrications
Thu. Sep 18, 2014 2:00 PM - 5:15 PM C3 (B31)
4:15 PM - 4:30 PM
Keywords:sinusoidal grating,spectroscopic ellipsometry,nickel