The 75th JSAP Autumn Meeting, 2014

Presentation information

Print

Oral presentation

18．JSAP-OSA Joint Symposia » 18.4 Optical Micro-sensing，Manipulation，and Fabrications

[18p-C3-1~9] 18.4 Optical Micro-sensing，Manipulation，and Fabrications

Thu. Sep 18, 2014 2:00 PM - 5:15 PM C3 (B31)

5:00 PM - 5:15 PM

▲ [18p-C3-9] Reversible deformation of photoresist structures fabricated by direct laser write technique

〇Vygantas Mizeikis (Shizuoka University)

Keywords:Direct laser write,Laser microfabrication,Photoresist