The 75th JSAP Autumn Meeting, 2014

Presentation information

Print

Poster presentation

07. Beam Technology and Nanofabrication » 7.1 X-ray technologies

[18p-PB1-1~3] 7.1 X-ray technologies

Thu. Sep 18, 2014 1:30 PM - 3:30 PM PB1 (Gymnasium2)

ポスター掲示時間13:30～15:30(PB1会場)

1:30 PM - 3:30 PM

▲ [18p-PB1-2] High-precision curving process of Si wafer for X-ray MEMS mirror used in space application

Rasadujjaman Md1,2, ○Yuichi Kurashima1, Atsuhiko Maeda1, Hiroshi Hiroshima1, Hideki Takagi1, Eiichi Kondoh2, Yuichirou Ezoe3 (AIST1, Univ. of Yamanashi2, Tokyo Metropolitan Univ.3)

Keywords:MEMSミラー,メッキ,応力